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About Us
Company Profile
Philosophy Of Business
Enterprise History
Service Location
Services
W1 - Gas Engineering BU
W2 - Cleanroom Construction & MEP BU
W3 - High Vacuum BU
W4 - Specialty Gas Supply System & FMCS BU
W5 - Local Scrubber & Advanced Product BU
W6 - System Software Development BU
W7 - Wet Process & Chemical System BU
Project Achievements
Customer Service
Honorable Award
Cabinet Performance
Scrubber Performance
Investor Services
Company Overview
Financial and business information
Corporate governance
Corporate Organization Chart
Management Team
Board of Directors
Committee
Major Shareholder
Important Internal Regulations Of The Company
Internal Audit Organization And Operation
Others
Shareholder Section
Investor Relations
Contact Us
News
Careers
Employee Benefits
Current Openings
Sustainability
CSR Report
Supplier Management Policy
Stakeholder Section
Intellectual Property Management Plan
Report on the Promotion of Ethical Corporate Management
Human Rights Policy
Sustainability Report
繁體中文
Local Scrubber
Installation and sales performance
Cumulative Installed Base
Industry
Domestic
International
Semiconductor Industry
> 2400 sets
> 300 sets
Optoelectronics and Epitaxy
Industry
> 30 sets
6 sets
Universities and
Research Institutes
5 sets
2 sets
Patents
